The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
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The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
Data publikacji: 13.01.2016
Czasopismo Techniczne, 2015, Mechanika Zeszyt 2-M (7) 2015, s. 119 - 124
Autorzy
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
This paper presents the influence of deposition conditions on texture and stress results of TiN coatings deposited by using the PVD magnetron process. Modification of parameters was related to the changes of temperature and substrate potential. The article presents the results of an analysis of texture and stress measurement obtained by X-ray methods and the results of microhardness measurement.
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Informacje: Czasopismo Techniczne, 2015, Mechanika Zeszyt 2-M (7) 2015, s. 119 - 124
Typ artykułu: Oryginalny artykuł naukowy
Tytuły:
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
Institute of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, Gliwice
Institute of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, Gliwice
Publikacja: 13.01.2016
Status artykułu: Otwarte
Licencja: Żadna
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