@article{b0a64a9e-46b7-419b-942c-6bb8da836d2c,
author = {Waldemar Kwaśny, Tymoteusz Jung},
title = {The influence of deposition conditions on structure
	of PVD coatings obtained in the magnetron process},
journal = {Czasopismo Techniczne},
volume = {2015},
number = {Mechanika Zeszyt 2-M (7) 2015},
year = {2016},
issn = {0011-4561},
pages = {119-124},keywords = {PVD coatings; stress analysis; structure and texture; X-ray analysis},
abstract = {This paper presents the influence of deposition conditions on texture and stress results of TiN coatings deposited by using the PVD magnetron process. Modification of parameters was related to the changes of temperature and substrate potential. The article presents the results of an analysis of texture and stress measurement obtained by X-ray methods and the results of microhardness measurement.},
doi = {},
url = {https://ejournals.eu/czasopismo/czasopismo-techniczne/artykul/the-influence-of-deposition-conditions-on-structure-of-pvd-coatings-obtained-in-the-magnetron-process}
}