The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
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The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
Publication date: 13.01.2016
Technical Transactions, 2015, Mechanics Issue 2-M (7) 2015, pp. 119 - 124
Authors
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
This paper presents the influence of deposition conditions on texture and stress results of TiN coatings deposited by using the PVD magnetron process. Modification of parameters was related to the changes of temperature and substrate potential. The article presents the results of an analysis of texture and stress measurement obtained by X-ray methods and the results of microhardness measurement.
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Information: Technical Transactions, 2015, Mechanics Issue 2-M (7) 2015, pp. 119 - 124
Article type: Original article
Titles:
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
The influence of deposition conditions on structure
of PVD coatings obtained in the magnetron process
Institute of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, Gliwice
Institute of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, Gliwice
Published at: 13.01.2016
Article status: Open
Licence: None
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