TY - JOUR
TI - The influence of deposition conditions on structure
	of PVD coatings obtained in the magnetron process
AU - Kwaśny, Waldemar
AU - Jung, Tymoteusz
TI - The influence of deposition conditions on structure
	of PVD coatings obtained in the magnetron process
AB - 
	This paper presents the influence of deposition conditions on texture and stress results of TiN coatings deposited by using the PVD magnetron process. Modification of parameters was related to the changes of temperature and substrate potential. The article presents the results of an analysis of texture and stress measurement obtained by X-ray methods and the results of microhardness measurement.
VL - 2015
IS - Mechanics Issue 2-M (7) 2015
PY - 2016
SN - 0011-4561
C1 - 2353-737X
SP - 119
EP - 124
UR - https://ejournals.eu/en/journal/czasopismo-techniczne/article/the-influence-of-deposition-conditions-on-structure-of-pvd-coatings-obtained-in-the-magnetron-process
KW - PVD coatings
KW - stress analysis
KW - structure and texture
KW - X-ray analysis